BluGlass to develop new semiconductor production equipment






Semiconductor device developer Bluglass will develop new machinery to manufacture devices such as laser diodes, LEDs and microLEDs with the aid of a grant from the Advanced Manufacturing Growth Centre.

AMGC will contribute $250,000, matched by the company, to a project to manufacture more efficient plasma deposition sources for the company’s 300 series RPCVD systems.

Bluglass is commercialising its proprietary remote plasma chemical vapour deposition (RPCVD) technology for manufacturing group III nitrides such as gallium nitride (GaN) which are essential components of millions of electronics devices.

The equipment is used to produce better performing, lower cost devices such as LEDs for overhead lighting, power electronics for power conversion and concentrated solar cells for utility scale solar power.

The new project aims to design and make a high-density, large-scale plasma source for the deposition of semiconductor devices such as laser diodes and LEDs.

The source will be suitable for retrofit on existing large industrial machines capable of deposition on single 12-inch wafers or multiple 4-inch wafers.

The 4-inch wafer is envisaged in BluGlass’s laser diode commercialisation roadmap.

AMGC managing director Dr Jens Goennemann said BluGlass was embracing the competitive advantaged of deep research and development.

Goennemann said: “Its technology promises laser diodes that are higher performing and more efficent.

“It is a game-changing development that delivers better value products to the market.”

​BluGlass was founded in 2005 to commercialise Macquarie University research, and floated in 2006.

The company’s joint venture with a subsidiary of Sumitomo Precision Products has successfully produced high quality crystalline GaN grown at low temperatures using RPCVD.

In 2009, BluGlass established a wholly owned subsidiary; BluSolar Pty Ltd to explore the potential of applying its proprietary technology for the development of high efficiency nitride based solar cells.

Picture: Bluglass

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